Dynamics and particle fluxes in atmospheric-pressure electronegative radio frequency microplasmas

摘要

We report on intricate dynamics observed in atmospheric-pressure rf electronegative discharges where electrons and anions are separated due to their different mobilities. This results in the formation of positively charged regions between an electronegative plasma core and an oscillating electron ensemble. It is found that for a given input power, the electron, ion (both positive and negative) and neutral fluxes increase as the gap size is reduced, resulting in a more efficient delivery of chemical species to a treated target.