Oxygen plasma post process to obtain consistent conductance of carbon nanotubes in carbon nanotube field-effect transistors

摘要

We modified the conductance of carbon nanotubes (CNTs) in carbon nanotube field-effect transistors by oxygen plasma post process (OPPP) to obtain consistent conductance after the CNTs were adsorbed by self-assembly monolayer method which is suitable for large scale mass production but hardly yields consistent conductance due to various complex factors involved. We have shown that the conductance of the CNTs can be tuned from 47 μS to zero by varying the OPPP time from 0 to 15 s. The reduction rate of the conductance was 9.8%/s implying that a tenth of the CNTs was removed every second.