Generating electron cyclotron resonance plasma using distributed scheme

摘要

This study employs a distributed microwave input system and permanent magnets to generate large-area electron cyclotron resonance (ECR) plasma. ECR plasmas were generated with nitrogen gas, and the plasma density was measured by Langmuir probe. A uniform ECR plasma with the electron density fluctuation of ±9.8% over 500 mm x 500 mm was reported. The proposed idea of generating uniform ECR plasma can be scaled to a much larger area by using n x n microwave input array system together with well-designed permanent magnets.