Graphene sheets embedded carbon film prepared by electron irradiation in electron cyclotron resonance plasma

摘要

We used a low energy electron irradiation technique to prepare graphene sheets embedded carbon (GSEC) film based on electron cyclotron resonance plasma. The particular n electronic structure of the GSEC film similar to bilayer graphene was verified by Raman spectra 2D band analyzing. The phase transition from amorphous carbon to GSEC was initiated when electron irradiation energy reached 40 eV, and the growth mechanism of GSEC was interpreted as inelastic scattering of low energy electrons. This finding indicates that the GSEC film obtained by low energy electron irradiation can be excepted for widely applications with outstanding electric properties.