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Detection of sulfur dioxide gas with graphene field effect transistor

机译:石墨烯场效应晶体管检测二氧化硫气体

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摘要

Graphene grown by chemical vapor deposition on a Cu foil and transferred onto a Si wafer has been used to fabricate a field effect transistor device that was used to study the sensing of SO_2 gas. It was found by in-situ measurements that the SO_2 strongly p-dopes the graphene and dramatically shifts its Dirac point. This effect was used to monitor the SO_2 gas. The detector can be completely reset by thermal annealing at 100 ℃ in high vacuum. The response and recovery of the detector are faster at higher temperatures. Moreover, the sensitivity of the SO_2 graphene detector increases, proportionally with increasing temperature.
机译:通过化学气相沉积在Cu箔上生长并转移到Si晶片上的石墨烯已被用于制造场效应晶体管器件,该器件用于研究SO_2气体的感测。通过现场测量发现,SO_2强烈地p掺杂了石墨烯,并极大地改变了其狄拉克点。该效应用于监测SO_2气体。通过在高真空下于100℃进行热退火可以完全重置检测器。在较高温度下,检测器的响应和恢复更快。此外,SO_2石墨烯检测器的灵敏度随温度升高成比例增加。

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  • 来源
    《Applied Physics Letters》 |2012年第16期|p.163114.1-163114.4|共4页
  • 作者单位

    School of Mechanical Engineering, University of Science and Technology Beijing, Beijing 100083, China,Department of Mechanical Engineering and the Material Science and Engineering Program,The University of Texas at Austin, Austin, Texas 78712, USA;

    School of Mechanical Engineering, University of Science and Technology Beijing, Beijing 100083, China;

    Department of Physics, Fujian Key Laboratory of Semiconductor Materials and Applications,Xiamen University, Xiamen 361005, China;

    Department of Mechanical Engineering and the Material Science and Engineering Program,The University of Texas at Austin, Austin, Texas 78712, USA;

    Department of Mechanical Engineering and the Material Science and Engineering Program,The University of Texas at Austin, Austin, Texas 78712, USA;

    Department of Mechanical Engineering and the Material Science and Engineering Program,The University of Texas at Austin, Austin, Texas 78712, USA;

    Department of Mechanical Engineering and the Material Science and Engineering Program,The University of Texas at Austin, Austin, Texas 78712, USA,Department of Physics, Fujian Key Laboratory of Semiconductor Materials and Applications,Xiamen University, Xiamen 361005, China;

    Department of Mechanical Engineering and the Material Science and Engineering Program,The University of Texas at Austin, Austin, Texas 78712, USA;

    Department of Mechanical Engineering and the Material Science and Engineering Program,The University of Texas at Austin, Austin, Texas 78712, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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