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The role of an interface on Ni film removal and surface roughness after irradiation by femtosecond laser pulses

机译:飞秒激光脉冲辐照后界面对镍膜去除和表面粗糙度的作用

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摘要

We have observed thin film removal from glass substrates after the irradiation of Ni films with femtosecond laser pulses in air. It was found that the material removal threshold and laser-induced morphology are dependent on film thickness. With decreasing thickness, material removal transitions from intra-film separation to removal at the Ni-glass interface. The Gaussian energy distribution of the laser pulse allows for intra-film separation in the annular region of the crater and interface separation in the center. We propose a model to explain these data as well as the observed increased surface roughness in the interfacial removal regions.
机译:我们已经观察到飞秒激光脉冲在空气中辐照Ni膜后,从玻璃基板上去除了薄膜。发现材料去除阈值和激光诱导的形态取决于膜厚度。随着厚度的减小,材料去除从膜内分离过渡到镍-玻璃界面处的去除。激光脉冲的高斯能量分布允许在弹坑的环形区域内进行薄膜内分离,并在中心进行界面分离。我们提出了一个模型来解释这些数据,以及在界面去除区域中观察到的增加的表面粗糙度。

著录项

  • 来源
    《Applied Physics Letters》 |2013年第18期|181602.1-181602.5|共5页
  • 作者单位

    Applied Physics Program, University of Michigan, Ann Arbor, Michigan 48109, USA;

    Department of Atmospheric, Oceanic & Space Sciences, University of Michigan, Ann Arbor, Michigan 48109,USA;

    Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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