Low pull-in voltage graphene electromechanical switch fabricated with a polymer sacrificial spacer

摘要

A simple bottom-up procedure using a polymer sacrificial spacer is presented to fabricate graphene electromechanical contact switch devices without using acid etching. Low pull-in voltage of below 2 V is achieved with good consistency on a run-to-run basis, which is compatible with the conventional, complementary metal-oxide-semiconductor circuit requirements. In addition, the formation of carbon-gold bonds at the contact position is proposed as another important mechanism for the irreversible switch-other than the well-known irreversible static friction.