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The demonstration of colossal magneto-capacitance effect with the promising gate stack characteristics on Ge (100) by the magnetic gate stack design

机译:通过磁栅叠层设计演示了在Ge(100)上具有广阔的栅叠层特性的巨大磁电容效应

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摘要

The tetragonal-phase BaTiO_3 as the high dielectric (HK) layer and the magnetic FePt film as the metal gate (MG) are proposed to be the gate stack scheme on the Ge (100) substrate. The ~75% dielectric constant (κ-value) improvement, ~100X gate leakage (Jg) reduction, and the promising Jg-equivalent-oxide-thickness (EOT) gate stack characteristics are achieved in this work with the colossal magneto-capacitance effect. The perpendicular magnetic field from the magnetic FePt MG film couples and triggers the more dipoles in the BaTiO_3 HK layer and then results in the super gate capacitance (C_(gate)) and κ-value. Super Jg-EOT gate stack characteristics with the magnetic gate stack design on the high mobility (Ge) substrate demonstrated in this work provides the useful solution for the future low power mobile device design.
机译:提出将四方相BaTiO_3作为高介电层(HK)和将FePt磁性膜作为金属栅(MG)作为Ge(100)衬底上的栅堆叠方案。这项工作具有巨大的磁电容效应,实现了〜75%的介电常数(κ值)提高,〜100倍的栅极漏电(Jg)降低以及有希望的Jg等效氧化物厚度(EOT)栅极堆叠特性。 FePt MG磁性薄膜的垂直磁场耦合并触发BaTiO_3 HK层中的更多偶极子,然后产生超栅极电容(C_(gate))和κ值。这项工作演示了在高迁移率(Ge)基板上具有磁性栅极堆叠设计的Super Jg-EOT栅极堆叠特性,为未来的低功耗移动设备设计提供了有用的解决方案。

著录项

  • 来源
    《Applied Physics Letters》 |2014年第26期|262406.1-262406.3|共3页
  • 作者

    M.-H. Liao; S.-C. Huang;

  • 作者单位

    Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan;

    Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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