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Tunnel barrier engineering of titanium oxide for high non-linearity of selector-less resistive random access memory

机译:二氧化钛的隧道势垒工程,可实现无选择器电阻式随机存取存储器的高非线性

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摘要

In this study, the effect of the oxygen profile and thickness of multiple-layers TiO_x on tunnel barrier characteristics was investigated to achieve high non-linearity in low-resistance state current (I_(LRS))-To form the tunnel barrier in multiple-layer of TiO_x, tunnel barrier engineering in terms of the thickness and oxygen profile was attempted using deposition and thermal oxidation times. It modified the defect distribution of the tunnel barrier for effective suppression of I_(LRS) at off-state (1/2V_(Read)). By inserting modified tunnel barrier in resistive random access memory, a high non-linear I_(LRS) was exhibited with a significantly lowered I_(LRS) for 1/2V_(Read).
机译:在这项研究中,研究了氧分布和多层TiO_x的厚度对隧道势垒特性的影响,以在低电阻状态电流(I_(LRS))中实现高非线性-在多层隧道中形成隧道势垒在TiO_x层上,尝试使用沉积和热氧化时间进行厚度和氧分布方面的隧道势垒工程。它修改了隧道势垒的缺陷分布,以有效抑制处于关闭状态(1 / 2V_(Read))的I_(LRS)。通过在电阻随机存取存储器中插入修改后的隧道势垒,可以表现出较高的非线性I_(LRS),而对于1 / 2V_(Read)则I_(LRS)大大降低。

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  • 来源
    《Applied Physics Letters》 |2014年第5期|052108.1-052108.4|共4页
  • 作者单位

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

    Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, South Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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