Sub-10 pW/Hz~(0.5) room temperature Ni nano-bolometer

摘要

In this letter, we report on room temperature Ni nano-bolometers with a measured electrical noise equivalent power of 8.7pW/Hz~(0.5) based on air-suspended and self-aligned nano-stack (SiO_2/Ni/ SiO_2) structures, which is an outstanding electrical performance among uncooled microano-bol-ometers. This result, together with electrical resistances of 172.6 Ω and modulation frequencies of 15-30 kHz, shows that Ni nano-bolometers can be easily coupled to terahertz antennas and are appropriate for fast passive imaging applications.