Monolithic integration of individually addressable light-emitting diode color pixels

摘要

Monolithic integration of individually addressable light-emitting diode (LED) color pixels is reported. The integration is enabled by local strain engineering. The use of a nanostructured active region comprising one or more nanopillars allows color tuning across the visible spectrum. In the current work, integration of amber, green, and blue pixels is demonstrated. The nanopillar LEDs exhibit an electrical performance comparable to that of a conventional thin-film LED fabricated on the same wafer. The proposed platform uses only standard epitaxy and a similar process flow as a conventional LED. It is also shown that the emission intensity can be linearly tuned without shifting the color coordinate of individual pixels.