Optimization of the electrical and optical properties of vanadium doped InZnO thin films

摘要

The transparent conducting properties of vanadium-doped indium zinc oxide (VIZO) have been investigated as a function of V doping concentration. The VIZO film demonstrated an average transmittance of above 86% in the visible range, and the sheet resistance showed 10.81 Omega/square with a V doping concentration of 0.18%. In order to verify the applicability as a transparent conductor, the figure of merit was obtained to be 2.07 x 10(-2) Omega(-1). The changes of electrical characteristics could be correlated with the changes of the electronic structure, such as the oxidation state and the band edge defect states below the conduction band. By applying the optimal condition, the VIZO film achieved a high workfunction of 5.16 eV. Published by AIP Publishing.