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Zirconium-doped hybrid films patterned by soft lithography for distributed-feedback lasers

机译:通过软光刻图案化的掺锆杂化薄膜,用于分布式反馈激光器

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摘要

Zirconium (Zr)-doped hybrid films containing Rhodamine 6G (Rh6G) were prepared by spin-coating on glass substrates with different Zr–Si molar ratio. Second-order distributed-feedback (DFB) resonators with large surface-relief modulation depth over 160 nm could be fabricated by soft lithographic technique using a polydimethylsiloxane (PDMS) replica. Optically pumped by a pulsed frequency-doubled Q-switched Nd:YAG laser, the emission wavelength of the DFB-lasers can be tuned over 16 nm by changing the grating period. With the optimization of the Zr–Si molar ratio, low laser threshold of 3 μJ/mm2 was obtained.
机译:通过在具有不同Zr-Si摩尔比的玻璃基板上旋涂制备含罗丹明6G(Rh6G)的掺锆(Zr)的杂化膜。可以通过软光刻技术使用聚二甲基硅氧烷(PDMS)复制品制造具有超过160 nm的较大表面浮雕调制深度的二阶分布式反馈(DFB)谐振器。通过脉冲倍频Q开关Nd:YAG激光器进行光泵浦,可以通过更改光栅周期在16 nm范围内调整DFB激光器的发射波长。通过优化Zr-Si摩尔比,获得了3μJ/ mm 2 的低激光阈值。

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