Fabrication of silicone rubber periodic micro-suction cup structures using a 193nm ArF excimer laser

摘要

Silicone periodic micro-suction cup structures approximately 1 mu m in diameter and 2 mu m in height and at regular intervals of 2.5 mu m were directly fabricated by ArF excimer laser. The laser was focused on Al-coated silicone by silica microspheres, each of diameter 2.5 mu m, which covered the entire surface. The silicone underneath each microsphere photochemically swelled, after laser-ablating the Al to limit the diameter of the swelling. The Al also enabled the adjusting of the focal point to the surface of the silicone to form a hole approximately 0.5 mu m in diameter centered at each swelled silicone structure. The fabricated silicone micro-suction cup structures showed superhydrophobicity. (C) 2019 The Japan Society of Applied Physics