Deposition Of Zinc Oxide Thin Films In Supercritical Carbon Dioxide Solutions

摘要

This article reports the deposition of ZnO thin films in supercritical CO_2 solutions likely for the first time. Zincacetylacetonate was dissolved in supercritical CO_2, together with oxygen, and was processed at 8-13MPa and 230-380℃. Continuous crystalline films were obtained on Si and sapphire at temperatures higher than 280 ℃. The-band-edge emission at 370 nm was confirmed in photoluminescence spectra.