Monolithic Integration of a Silica-Based Arrayed Waveguide Grating Filter and Silicon Variable Optical Attenuators Based on p-i-n Carrier-Injection Structure

摘要

We demonstrate the monolithic integration of a silica-based arrayed waveguide grating (AWG) filter and silicon (Si) variable optical attenuators (VOAs) by connecting them with spot-size converters (SSCs). The AWG is based on a silica waveguide with an index contrast (△) of ～3%, and the Si VOA is based on a rib-type Si wire waveguide with a p-i-n lateral diode structure. The integrated device performs wavelength demultiplexing in 16 channels and has fast optical power attenuation with a -3dB bandwidth of 50 MHz in each channel.