Fabrication of a Quartz-Crystal-Microbalance/Surface-Plasmon-Resonance Hybrid Sensor and Its Use for Detection of Polymer Thin-Film Deposition and Evaluation of Moisture Sorption Phenomena

摘要

We fabricated a hybrid sensor utilizing quartz crystal microbalance (QCM) and surface plasmon resonance (SPR) spectroscopy. We confirmed its effectiveness by observing QCM frequency shifts and SPR wavelength changes for two processes: deposition of various transparent polymer thin films and moisture sorption. For thin-film deposition, the relationship between the QCM frequency and SPR wavelength was found to depend on the refractive index of the film material. For moisture sorption, the direction of SPR wavelength shift depended on the film thickness. This was estimated to be caused by film swelling and decrease in refractive index induced by moisture.