Independent Control of Amplitude and Periodicity in Buckling Structure for Light In- and Out-Coupling

摘要

Buckling structures, which can be used for enhancing in- and out-coupling of light in optoelectronic devices, were formed on the poly(dimethylsiloxane) (PDMS) layer by depositing an aluminium (Al) layer and cooling. Although independent control of their periodicity and amplitude had been impossible only by adjusting the Al layer thickness, we succeeded in making it possible by adopting ultraviolet/ozone (UVO) treatment. This is because the compressive stress was significantly enhanced due to the surface densification of the PDMS layer by the UVO treatment. The buckling structure with higher amplitude and an appropriate periodicity provides a crucial advantage for future optoelectronic applications.