A grating coupler with a trapezoidal hole array for perfectly vertical light coupling between optical fibers and waveguides

摘要

A grating coupler with a trapezoidal hole array was designed and fabricated for perfectly vertical light coupling between a single-mode optical fiber and a silicon waveguide on a silicon-on-insulator (SOI) substrate. The grating coupler with an efficiency of 53% was computationally designed at a 1.1-mu m-thick buried oxide (BOX) layer. The grating coupler and silicon waveguide were fabricated on the SOI substrate with a 3.0-mu m-thick BOX layer by a single full-etch process. The measured coupling efficiency was 24% for TE-polarized light at 1528nm wavelength, which was 0.69 times of the calculated coupling efficiency for the 3.0-mu m-thick BOX layer. (C) 2017 The Japan Society of Applied Physics