Three-dimensional shape measurement of non-full-field reflective surfaces

摘要

We describe a technique for the measurement of non-full-field reflective surfaces by using phase-stepping profilometry. We explain the principles of phase demodulation and discuss three-dimensional (3-D) height reconstruction in the case of measuring surfaces with reflective properties such as plain glass and mirrored glass. A number of required calibration algorithms are described to obtain surface slopes and reconstructed 3-D heights of the whole surface. Masking for non-full-field objects and the surface reconstruction procedure are demonstrated mathematically and algorithmically. Several experimental results are given for glass with different shapes and defects. Measurement of a spherical mirror with a known radius has also allowed us to show the performance of the proposed technique. This allows for the possibility to compare 3-D data from the known object with data taken from the measurement system. (c) 2005 Optical Society of America.