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Analysis of a scanning pentaprism system for measurements of large flat mirrors

机译:用于大型平面镜测量的扫描五棱镜系统分析

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摘要

The optical surface of a large optical flat can be measured using an autocollimator and scanning pentaprism system. The autocollimator measures the slope difference between a point on the mirror and a reference point. Such a system was built and previously operated at the University of Arizona. We discuss refinements that were made to the hardware, the alignment procedure, and the error analysis. The improved system was demonstrated with a 1.6 m flat mirror, which was measured to be flat to 12 nm rms. The uncertainty in the measurement is only 9 nm rms.
机译:大型光学平面的光学表面可以使用自动准直仪和扫描五棱镜系统进行测量。自动准直仪测量反射镜上的点与参考点之间的斜率差。这样的系统是以前在亚利桑那大学建造并运行的。我们讨论了对硬件,对齐过程和错误分析的改进。用1.6 m平面镜演示了改进的系统,该平面镜测得的平坦度为12 nm rms。测量中的不确定度仅为9 nm rms。

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