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RADIO FREQUENCY GLOW DISCHARGE MASS SPECTROMETRY FOR THE CHARACTERIZATION OF BULK POLYMERS

机译:无线电频率辉光放电质谱法表征大分子聚合物

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摘要

A radio frequency (rf)-powered glow discharge (GD) atomization/ionization source is utilized to determine the applicability of the technique for direct polymer analysis. A series of PTFE-based polymers are studied to assess their fingerprint mass spectra and to distinguish each sample by its differing base peaks and relative peak intensities. A parametric study with respect to discharge gas pressure and rf power is conducted to evaluate their respective roles in the sputtering process as well as possible ionization mechanisms. The results of the GD sputtering processes are examined by scanning electron micrographs of a sputtered PTFE surface. Excellent discharge stabilization characteristics ( < 3 min) were observed in temporal response curves. Internal stability with respect to signal intensity is observed to be < 5% RSD for samples of different thicknesses. Finally, the ability to obtain depth profiles of layered samples was demonstrated for the case of a Cu layer deposited on a PTFE substrate.
机译:利用射频(rf)供电的辉光放电(GD)雾化/电离源来确定该技术在直接聚合物分析中的适用性。研究了一系列基于PTFE的聚合物,以评估其指纹质谱,并通过其不同的基峰和相对峰强度来区分每个样品。进行了有关排气压力和射频功率的参数研究,以评估它们在溅射过程中的各自作用以及可能的电离机理。 GD溅射过程的结果通过溅射的PTFE表面的扫描电子显微镜照片检查。在时间响应曲线中观察到出色的放电稳定特性(<3分钟)。对于不同厚度的样品,相对于信号强度的内部稳定性被观察为<5%RSD。最后,对于在PTFE基板上沉积铜层的情况,证明了获得分层样品深度轮廓的能力。

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