An easy to control all-metal in-line-series ohmic RF MEMS switch

摘要

The analysis, design and simulation of a novel easy to control all-metal in-line-series ohmic RF MEMS switch is presented, for applications where the operating frequency ranges from DC to 4 GHz. The proposed switch, due to its unique shape and size, assures high isolation and great linearity fulfilling the necessary requirements as concerns loss, power handling and power consumption. Simplicity has been set as the key success factor implying robustness and high fabrication yield. On the other hand, the specially designed cantilever-shape (hammerhead) allows distributed actuation force ensuring high controllability as well as reliability making the presented RF MEMS switch one of its kind.