Reusing rinse wastewater at a semiconductor plant

摘要

Two pilot rinse wastewater reuse projects were developed as part of a long-term water conservation program for a Motorola semiconductor manufacturing site in Phoenix, Ariz. The conceptual designs for the projects grew out of a detailed wastewater reuse study that characterized wastewater streams at their generation points. Both treatment techniques were specifically researched, bench-tested, and adapted to further water conservation efforts while ensuring 100 percent compliance with appropriate effluent regulations and industrial discharge permit conditions. Together, the pilot projects save the city of Phoenix approximately 45 mil gal (17 x 10~4 m~3) of water annually.