Preparation and characterization of chemically vapor deposited ZrO_2 coating on nicked and ceramic fiber substrates

摘要

Monoclinic ZrO_2 was deposited on several metallic and ceramic substrates by reacting ZrCl_4, CO_2, and H_2 at tem- peratures of 800° to 1050 deg C. Ni substrates reacted signifi- cantly in the ZrO_2 coating environment since the coating was porous and contained a considerable amount of Ni. In contrast, the coating deposited on SiC and aluminoborosili- cate fibers was highly crystalline, faceted, and dense without any apparent interaction with the substrate materials.