GRANULAR DIAMOND THIN FILMS PREPARED BY HFCVD

摘要

Granular diamond thin films prepared by HFCVD using feed gas of acetylene C_2H_2 diluted in hydrogen H_2 is reported. Obtained films composed from diamond particles dispersed and embedded in amorphous graphite were confirmed by AFM, SEM, XRD and Raman analysis. Raman spectrum always show intensive diamond peak at wave number around ～1332 cm~(-1) and small graphite peak at wave number ～1600 cm~(-1). SEM and AFM images indicate clear granular character of prepared thin films. XRD pattern shows the peaks at 2θ-angles of 43°, 44° and 45°, which belong various type of diamond structures. Diamond particles aggregation in "cauliflower appearance" also have been observed. AFM pictures and Raman spectroscopy reveal that diamond particles were composed from well-oriented diamond nanocrystals.