High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography

摘要

Microcontact printing (μCP) has developed rapidly into a robust printing tool over the past few years because of its processing advantages in comparison to conventional lithographic techniques.In a typical μCP scheme, a soft elastomeric stamp is brought into intimate contact with a substrate to transfer ink molecules from the stamp to the substrate. Contact printing is not diffraction limited, and can in principle be used to pattern surfaces with sub-100nm features. However, deformation of the soft-polymer stamps due to the limited mechanical stability of the elastomer during stamp fabrication or printing, leading to pairing, buckling, or roof collapse of structures, renders them unsuitable for high-resolution μCP.New stamp materials and composite stamps may overcome these problems.