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Transfer of Functional Ceramic Thin Films Using a Thermal Release Process

机译:使用热释放工艺转移功能陶瓷薄膜

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摘要

Being ferroelectric, piezoelectric, and pyroelectric, lead zirco-nate titanate (PZT) is one of the most useful and prominent electroceramics and is commonly used as the transduction element of actuators and sensors in microelectromechanical systems (MEMS) and micro-optics~([1-6]) and in memory devices.~([7,8]) It is also being explored for new applications such as nano-rods,~([9]) domain physics,~([10]) and nanodevices.~([11,12])
机译:锆酸钛酸铅(PZT)具有铁电性,压电性和热释电性,是最有用和最突出的电陶瓷之一,通常在微机电系统(MEMS)和微光学系统中用作致动器和传感器的转换元件。 [1-6]]和存储设备中。〜([7,8])也正在探索它的新应用,例如纳米棒,〜([9])领域物理学,〜([10])和纳米设备。 〜([11,12])

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  • 来源
    《Advanced Materials》 |2011年第10期|p.1252-1256|共5页
  • 作者单位

    Electrical and Electronic Engineering Department Imperial College London London SW7 2AZ,UK;

    Electrical and Electronic Engineering Department Imperial College London London SW7 2AZ,UK;

    Electrical and Electronic Engineering Department Imperial College London London SW7 2AZ,UK;

    Materials Department Cranfield University Cranfield MK43 0AL, UK;

    Materials Department Cranfield University Cranfield MK43 0AL, UK;

    School of Computing and Mathematical Sciences University of Greenwich London SE10 9LS,UK;

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