Comment on 'MEL-type Pure-Silica Zeolite Nanocrystals Prepared by an Evaporation-Assisted Two-Stage Synthesis Method as Ultra-Low-k Materials'

摘要

A bottle-neck in the application of zeolite films as low-k dielectrics is the presence of 40-80 nm zeolite nanoparticles composing the film, causing both large mesopores and hampering the grooving of nanofeatures. Evaporation-assisted two-stage synthesis of MEL-type zeolite nanosuspensions avoiding 40-80 nm zeolite nano-particle formation in suspension was recently proposed in this journal for the preparation of zeolite films with improved properties and with possibility to groove nanofeatures at 65 nm.