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Planar Optical Waveguide Sensor Structures with Grating Couplers

机译:带有光栅耦合器的平面光波导传感器结构

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摘要

The paper presents optical planar waveguide sensor structures with grating couplers of groove density χ = 2400 g/mm. The waveguide films were obtained using sol-gel method, in which the grating couplers were fabricated by the embossing method. The results of theoretical analysis as well as the results of experimental research have been presented.
机译:本文提出了一种光学平面波导传感器结构,其光栅耦合器的槽密度χ= 2400 g / mm。使用溶胶-凝胶法获得波导膜,其中通过压花方法制造光栅耦合器。提出了理论分析的结果以及实验研究的结果。

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