USE OF NOVEL METHODS FOR THE INVESTIGATION OF THE BORON DISTRIBUTION IN CVD DIAMOND

摘要

Previous work on boron-doped CVD diamond films has indicated inhomogeneity of boron dis- tribution. A variety of methods has been used to investigate the nature of these inhomogeneities. The methods used include electron irradiation in a transmission electron microscope followed by helium cooled microscopic photoluminescence studies, imaging SIMS and micro-Raman imaging. A number of sharp B- related photoluminescence lines has been identified and found to vary considerably from one location to another. This evidence of inhomogeneity is confirmed by B mapping using imaging SIMS and micro- Raman microscopy.