Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane

摘要

Device structure. ( ) Top view of Type #1 – membrane as sensing element. ( ) Cross sectional view of Type #1 – membrane as sensing element. ( ) Top view of Type #2 – thin metallic glass bar as a sensing element. ( ) Cross sectional view of Type #2 – thin metallic glass bar as a sensing element. ( ) Strain estimation.