Angle insensitive color filter based on Metal-SiOx-Metal structure is proposed in this paper, which can keep the same perceived transmitted color when the incidence angle changes from 0° to 60°, especially for p-polarization light. Various silicon oxide films deposited by reaction magnetron sputtering with a tunable refractive index from 1.97 to 3.84 is introduced to meet the strict angle insensitive resonance conditions. The angle resolved spectral filtering for both p-polarization light and s-polarization light are quite well, which can be attributed to the different physical origins for the high angular tolerance for two polarizations. Finally, the effect of SiOx absorption and Ag thickness on the peak transmittance are analyzed.
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