Scratches are deleterious to precision optics because they can obscure and modulate incident laser light, which will increase the probability of damage to optical components. We here imitated the generation of brittle and ductile scratches during polishing process and endeavored to find out the possible influence of scratches on laser induced damage. Brittle scratches can be induced by spiking large sized abrasives and small abrasives may only generate ductile scratches. Both surface roughness and transmittivity are degraded due to the appearance of brittle scratches while ductile scratches make little difference to surface roughness and transmittance. However, ductile and brittle scratches greatly increase the density of damage about one order of magnitude relative to unscratched surface. In particular, ductile scratches also play an unignorable role in laser induced damage, which is different from previous knowledge. Furthermore, ZrO2 and Al2O3 polished surfaces appear to perform best in terms of damage density.
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