弱碱性阴离子交换树脂在电子级过氧化氢制备过程中的应用

摘要

The method for manufacturing the ultra purity hydrogen peroxide conform to the SEMI C12 standard, which by purifying food grade hydrogen peroxide with weak-base anion-exchange resin was inves-tigated, and the safety and purifying effect of weak-base anion-exchange resin is better than these of strong-base anion-exchange resin was determined. In 25 ℃, weak-base anion-exchange resin is stability in the hy-drogen peroxide solution, which doesˊt cause to decomposition of hydrogen peroxide or increase of tempera-ture. The concentration of chloridion, sulfate radical and nitrate of ultra purity hydrogen peroxide ,which was purified by weak-base anion-exchange resin ,was less than 15 μg/L. The purifying degree was more than 99%, and the effect of repeatedly using the weak-base anion-exchange resin would not change.%研究了通过阴离子交换树脂净化食品级过氧化氢获得符合SEMI C12标准的超纯高净过氧化氢的方法，并确定了弱碱性阴离子交换树脂比强碱性阴离子交换树脂的安全性与净化效果都要好。在25℃条件下，弱碱性阴离子交换树脂在过氧化氢溶液中平稳，不会引起过氧化氢分解，温度稳定不上升；通过弱碱性阴离子交换树脂净化获得的过氧化氢的氯离子、硫酸根和硝酸根的含量均小于15μg/L，净化度均大于99%，而且重复使用的弱碱性阴离子交换树脂的净化效果不会发生明显变化。