CZ法单晶等径长模糊控制系统设计

摘要

针对单晶等径生长过程中主要是对系统的温度和晶体测径环节的控制,介绍了一种基于模糊控制与PID算法的CZ法单晶等径生长控制系统,详细阐述系统的组成,重点介绍系统采用双闭环串级控制.最后通过仿真测试,结果表明,该系统具有对现场温度、单晶直径等参数的合理控制和调节功能,能够有效地改善系统控制性能.%Constant diameter growth for single crystal is mainly realized by controlling temperature and growing speed. The paper illustrates CZ method single crystal growth based on fuzzy control and P1D algorithm and presents system composition, especially double-loop cascade control. The simulation test results show that the system has reasonable control and regulation functions for on-site temperature and crystal diameter and other parameters, and can effectively improve the control performance.