高耐温精密冷反光镜研制

摘要

The precision cold reflector with high temperature stability is a common component in projector optical system.This reflector can stand high temperature, reflect visible light, transmit infrared light.We use low expansion coefficient substrate, PVD coating process with IAD, to obtain the cold reflector.The reflector has visible spectrum average reflectance higher than 95 ％, infrared spectrum transmittance above 85％.The film stability of reflector endured 450℃ without any damage.%高耐温精密冷反光镜是应用于影像光学系统的一种常用光学元件,它具有高耐温性、反射可见光、透射红外光的特点.本文介绍了采用低膨胀系数的高耐温性基底材料,利用电子束热蒸发物理气相沉积镀膜方法及离子辅助沉积工艺,制备出了可见光光谱平均反射率高于95%、红外光光谱平均透过率高于85%,膜层耐温性能达到450℃高温下膜层无异常的反光镜产品,并实现了批量生产.