真空电子功率器件用AlN陶瓷输出窗

摘要

本文叙述了陶瓷在功率电子器件输出窗组件中具有特殊地位和作用.当今,氮化铝陶瓷具有高热导率,低的介质损耗和非常低的次级电子发射系数,是一种理想的输出窗片材料.%Ceramics have special position and function in output windows for vacuum electronics power devices.Aluminum nitride ceramics have high thermal conductivity,low dielectric loss and very low secondary electron emission.We make a point that aluminum nitride ceramics are ideal output window materials.