限流元件流导测量技术研究进展

摘要

In the application of vacuum technology,flow limiting element conductance is mainly used for producing tiny gas flow of gas micro-flow meter,providing standard dynamic pressure for vacuum system and calibration of vacuum leak. Measurement methods for orifice conductance consist of constant pressure method,constant volume method,flow comparison method,linear vacuum gauge method and pressure increasing method. This article introduces the applicable scope of four commonly used methods. The application of various measurement methods and their restrictions are enumer-ated,and compares the characteristics of different measurement methods.%在真空技术应用中,限流元件流导主要用于气体微流量计微小气体流量的产生、提供真空室动态标准压力及真空漏孔的校准.目前测量限流元件流导的方法主要有恒压法、定容法、流量比较法、线性规法、升压法.文章介绍了国内外测量限流元件流导的常用方法,列举了各种测量方法的适用范围和限制因素,并对比不同测量方法的特点.