MEMS型电容薄膜真空计研究进展

摘要

目前常用的电容薄膜真空计体积大、重量重,不能满足深空探测、临近空间探索、战略武器、战地医疗等特殊领域的真空测量需求.基于MEMS技术的电容薄膜真空计,能够使传感器、信号处理和控制电路等结构微型化,突破了传统电容薄膜真空计外形及质量限制,具有体积小、重量轻、功耗低、便于集成化等优点,成为真空测量仪器研究的热点,能更好地满足特殊条件下的真空测量需求.文章对MEMS型电容薄膜真空计的发展现状、技术特点等进行了探讨研究,并对其发展前景提出展望.%Nowadays,traditional capacitance diaphragm vacuum gauge cannot meet the requirements for vacuum measurement in deep space exploration,near space exploration,strategic weapon,and combat medicine and so on,due to its volume and weight. The capacitance diaphragm vacuum gauge based on MEMS technology has been designed. The sen-sors and signal processing and controlling circuits can be made into microminiaturization. It has the advantages of volume, weight,power,integration compared with the traditional vacuum gauges. The study on MEMS-type capacitance dia-phragm vacuum gauge has become the hot spot in this area. It can meet the requirements for vacuum measurement in the special areas. In the paper,the research status,technical characteristics and prospects of MEMS-type capacitance dia-phragm vacuum gauge are described.