Polymerase chain reaction (PCR) technology has been successfully used in clinic diagnostic and modern molecular biology for gene analyzing. An integrated microstructure PCR-DNA amplification biochip based on MEMS technology was fabricated, which includes heater, temperature sensor, reaction chamber and inlet channels. The temperature characteristic, design and fabrication were presented.%聚合酶链式反应(PCR)技术已在分子生物学、基因测序、医学诊断等方面得到广泛的应用。基于MEMS技术研制了微结构的集成PCR-DNA分子扩增生物芯片,芯片集成了加热子、温度传感器、反应室、进样通道等;还介绍了芯片的设计、制作、温度循环特性。
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