微机械电容式压力传感器的变换电路

摘要

A kind of capacitance to voltage converting circuit designed fora new-type micromechanical differential capacitive pressure sensor is described in detail on the basis of introducing the new-type pressure sensor.The experimental data have been shown to testify the advantage of the circuit.%在介绍一种新型微机械差动电容式压力传感器的基础上,重点介绍一种为其配套的电容—电压变换电路。并以实验结果反映其电路的优点。