四相敏感元件测量三轴力的传感方法研究

摘要

三轴力传感器技术正在成为近年来的研究热点.研究一种利用四相敏感元件来测量三轴力的传感方法,并为三轴力的计算找到了一个通用的计算模型.通过对几种典型的基于力信号、电信号和光信号原理的三轴力传感器的实验结果进行分析,验证了利用四相敏感元件测量三轴力的可行性和可靠性.期望该方法能够对其他三轴力传感器的设计提供有益的帮助.%As most researches focus on the three-axis force sensors in recent years, a general formula is summarized through research on measuring three-axis force with four-part sensing elements based on mechanical signals,electrical signals and optical signals. With the experimental results, the feasibility and reliability of measuring three-axis force with four-part sensing elements are verified. It is expected that this formula can benefit the design and fabrication of new tactile sensing systems.