SU-8 is used as stuctural material, UV light photolithography process is adopted, especially inclined exposure technology, a micro-flow channel which is a new type, miniaturization, low cost, three-dimensional structure,high aspect ratio is processed and its height is about 1 100 pjn. Exposure dosage,prebaking time,post-baking time and development time needed by fabrication processing of the micro-flow channel are conformed preliminary to offer a reference for processing micro flow channel in a different size. The micro-flow channel based on this method is used in micro-flow cytometers, can provide many parameters such as red blood cells count, hemoglobin concentration,platelet count and red blood cell index,etc.%以SU-8作为结构材料,采用紫外光刻工艺,尤以斜曝光工艺为主,制造一种新型的、小型化的、低成本的、三维的、高深宽比的微流沟道,微流沟道的高度约为1 100μm.初步确定出加工此微流沟道结构所需要的曝光计量、前烘时间、后烘时间和显影时间以及工艺方法,为加工其他尺寸的微流沟道提供参考.基于此方法加工的微流沟道可以应用在微型流式细胞仪上,来提供红细胞计数、血色素浓度、血小板计数和红细胞单元指数等参数.
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