A new type of grating sensor are applied in measurement of micro-displacement in this experiment. By comparing the relation between linear (or angular) displacement and the movement number of Moire fringes, the experiment shows that grating sensors have advantages of good linearity ( R2 ≥ 0. 999) and accuracy ( error ≤ 2.0% )in the measurement of micro-displacement. The feasibility and reliability of grating sensors are verified.%实验将新型光栅传感器应用于微位移测量之中.通过比较线(角)位移与莫尔条纹移动个数之间的关系,实验发现,在微位移测量中光栅传感器具有极好的线性度(R2≥0.999)和精确度(误差≤2.0%).实验验证了光栅传感器在微位移测量中可行性和可靠性.
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