HEMT微加速度计的结构优化设计

摘要

In order to meet requirements on high structural sensitivity and output sensitivity of HEMT microaccelerometer,elastic structure of micro-accelerometer is optimized and get a new micro-accelerometer structure of fold beam.Use ANSYS finite element analysis software to simulate original structure and new structure of accelerometer.Through calculation and analysis comparison,the result shows that optimized structure of accelerometer is reasonable and meet design goal,sensitivity is an order of magnitude more than the original and output sensitivity is three times more than the original.%为满足HEMT微加速度计的高结构灵敏度和输出灵敏度的要求,对微加速度计的弹性结构进行了优化设计,得到一种全新的微加速度计折梁结构.利用ANSYS有限元分析软件对加速度计原结构和新结构进行仿真,通过计算和分析比较,结果表明:优化后加速度计结构合理,满足设计目标,新结构的结构灵敏度提高了1个数量级,输出灵敏度比之前增大了3倍.