用于低温环境的铂电阻温度微传感器

摘要

目前,铂电阻温度传感器主要应用于73 K(-200℃)以上环境的温度检测.设计了可用于10K(-263℃)～200 K(-73℃)低温区的铂电阻温度微传感器.铂电阻温度微传感器采用对称的折回型结构,这种结构有效地降低了交流感抗的影响.传感器的敏感薄膜是一层采用磁控直流溅射沉积厚度为200 nm的铂薄膜.采用QD PPMS仪器测试传感器的电阻与温度的变化关系,得出传感器的电阻温度系数(TCR):研制的温度传感器的电阻温度系数在温度高于30 K(-243℃)时可达到9980×10-6/K,同时在低于30K(-243℃)的深低温区域TCR也可达到3730×10-6/K.%Currently Pt resistance temperature sensor is mainly deployed for the measurement of the temperature higher than 73 K that is -200 ℃. Pt resistance temperature microsensor for low temperature region range of 10 K ( -263 ℃ ) - 200 K ( - 73 ℃ ) is studied. The symmetrical turn back structure which effectively reduces the influence of impendence of the alternating current ( AC) is designed. The Pt film with thickness of 200 nm is deposited by magnetron direct current ( DC) sputtering process. The relationship between resistance and temperature of Pt microsensor is characterized by QD PPMS instrument, and TCR can achieve 9 980 × 10-6/K while T >30 K( -243 ℃) ,and 3 730 × 10-6/K while T<30 K( -243 ℃ ) respectively.