高频响小体积三轴加速度计设计与实现

摘要

设计了一种基于微机电系统(MEMS)技术的高频响三轴加速度计,内部集成滤波电路和放大电路,实现了传感器与变换器的一体化.电路设计简单可靠,功耗低,稳定性好.电路板的结构采用刚挠结合印制板的设计,保证了传感器输出的高精度和低噪声特性.整机结构体积小巧,刚性好,3个方向的频率响应均可以达到5 kHz,实现了一个测点3个方向高频加速度参数的测量.通过性能指标校验和实验验证,证明传感器具有测量精度高、热灵敏度漂移小、横向效应低等优点,可应用于航空航天等领域.%A high frequency response triaxial acceleration sensor based on MEMS technology is designed.Filtering circuit and amplifier circuit are integrated in the sensor to realize integrative design of sensor and convertor.The design of circuit is simple,reliable,low power consumption and high stability.The design of flexible-rigid PCB is introduced into the structure of circuit board,which ensures high precision and low noise characteristics.Structure of whole sensor is small and has good rigidity,frequency response of three-directions reach 5 kHz.The triaxial acceleration parameter can be measured synchronously using the sensor at one measuring point.By the checkout of property and validation of experimentation,the sensor is proved to have the characteristic of high precision,small thermal sensitivity drift and low transverse effect,and it can be used in the fields such as aerospace.