电容式薄膜真空压力传感器设计

摘要

In order to meet the requirements of engineering models. In the research of the capacitive thin film vacuum pressure sensor,solve problems of insulation isolation between sensitive probe case and sensor case, nonlinearity compensation of sensor output signals,full circuits temperature compensation of thermal zero point drift use capacitive thin film packaging structure,shell of sensor acts as a pole of the capacitor,calibration test is performed in measuring pressure range of(0. 1~100)Pa,0. 2% FS measurement precision is achieved.%为了满足在工程型号上的使用要求,解决真空压力传感器敏感探头壳体与传感器壳体隔离绝缘问题;传感器输出信号非线性的补偿问题;传感器热零点漂移的全电路的温度补偿问题,采用电容式薄膜封装结构,壳体为电容的另一极,在0.1~100 Pa的范围内进行了校准测试,实现了传感器0.2%FS的测量精度.