高成本和低成本MEMS加速度计性能比较研究

摘要

受微加工技术的限制,微机电系统(MEMS)加速度计在精度和可靠性方面存在劣势,针对这一问题,基于Allan方差分析法,对高成本和低成本的两种MEMS加速度计进行了实测和分析,得到了5项噪声系数,对两种传感器的性能进行了评估和对比,验证了Allan方差方法应用于加速度计误差辨识的可行性,并为加速度计的使用和研究提供了依据.%Because of the limitations of micro-maching technology,micro-electro-mechanical system(MEMS) accelerometer has disadvantage in precision and reliability,aiming at this problem,high cost and low cost MEMS accelerometers are measured and analyzed based on Allan variance analysis method,five noise coefficients are obtained,performance of two kinds of sensors are evaluated and compared. The feasibility of applying Allan variance method to error identification of accelerometer is verified,and provide basis for application and research of accelerometer.